Study on MEMS Fabrication Techniques and Applications

MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and the integration with large area electronic devices. A new single crystal silicon Micro Electro Mechanical Systems (MEMS) fabrication process is proposed using proton-implantation smart-cut technique. Compared to conventional silicon on insulator (SOI) wafer fabrication processes for MEMS applications. The fabrication of free-standing high-carbon microstructures by soft lithographic techniques; these structures ranged in complexity from simple beams to complex, suspended deflectors. MEMS products are highly used in various fields like telecommunications, communications satellites, automotive, healthcare, in electronic devices and in many general applications.